Ion Implantation Condition for 2 μm Period Ion-Implanted Propagation Tracks

Conditions for triple-ion implantation (Ne⁺, Ne⁺, H₂⁺) into YSmLuCaGeIG crystal to form snake-type bubble propagation tracks, of period 2 μm and cell size 2 × 2.3 μm, were studied. The dependences on various implantation conditions of the minimum drive field HDmin and the bias margin, for 400°C annealing. Under certain implantation condition, propagation tracks with good characteristics were obtained, with H_Dmin = 39 Oe and a bias margin of 57-62 Oe for a drive field of 50 Oe.