• DocumentCode
    765365
  • Title

    Change in Implantation-Induced Anisotropy in Garnet Films After High-Temperature Annealing

  • Author

    Matsutera, H. ; Hidaka, Y.

  • Author_Institution
    Microelectronics Research Laboratories, NEC Corporation.
  • Volume
    1
  • Issue
    5
  • fYear
    1985
  • Firstpage
    586
  • Lastpage
    588
  • Abstract
    Citing the current poor understanding of changes in anisotropy field due to nonmagnetostrictive effects, the authors report the effect of high-temperature (up to 1000°C) annealing on anisotropy field change ¿Hk and lattice strain in Ne+ or H+ implanted garnet films. In all cases, the ¿Hk after annealing was found to depend only on the radiation damage level; the critical damage level at which ¿Hk saturated was about 2.4 eV/A3. The ¿Hk was attributed mainly to suppression of growth-induced anisotropy, caused by the radiation damage. The results for a second implantation-annealing were consistent with this.
  • Keywords
    Anisotropic magnetoresistance; Annealing; Atomic measurements; Capacitive sensors; Garnet films; Lattices; Magnetics; National electric code; Strain measurement; Temperature;
  • fLanguage
    English
  • Journal_Title
    Magnetics in Japan, IEEE Translation Journal on
  • Publisher
    ieee
  • ISSN
    0882-4959
  • Type

    jour

  • DOI
    10.1109/TJMJ.1985.4548873
  • Filename
    4548873