DocumentCode :
765365
Title :
Change in Implantation-Induced Anisotropy in Garnet Films After High-Temperature Annealing
Author :
Matsutera, H. ; Hidaka, Y.
Author_Institution :
Microelectronics Research Laboratories, NEC Corporation.
Volume :
1
Issue :
5
fYear :
1985
Firstpage :
586
Lastpage :
588
Abstract :
Citing the current poor understanding of changes in anisotropy field due to nonmagnetostrictive effects, the authors report the effect of high-temperature (up to 1000°C) annealing on anisotropy field change ¿Hk and lattice strain in Ne+ or H+ implanted garnet films. In all cases, the ¿Hk after annealing was found to depend only on the radiation damage level; the critical damage level at which ¿Hk saturated was about 2.4 eV/A3. The ¿Hk was attributed mainly to suppression of growth-induced anisotropy, caused by the radiation damage. The results for a second implantation-annealing were consistent with this.
Keywords :
Anisotropic magnetoresistance; Annealing; Atomic measurements; Capacitive sensors; Garnet films; Lattices; Magnetics; National electric code; Strain measurement; Temperature;
fLanguage :
English
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
Publisher :
ieee
ISSN :
0882-4959
Type :
jour
DOI :
10.1109/TJMJ.1985.4548873
Filename :
4548873
Link To Document :
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