Modeling of a helicon plasma source

A two-dimensional axisymmetric helicon plasma source with three-dimensional wave components is modeled. Plasma fluid equations are solved self-consistently with helicon wave equations. Electron inertia is taken into account to simulate the propagation of electrostatic wave components. The purpose of this paper is to describe the model in detail and present the results to verify wave propagation characteristics, power deposition mechanisms, especially bulk versus peripheral power absorption. We also study the effect of wave absorption characteristics on discharge plasma density and temperature profiles.