Title :
Preparation of TbFeCo Films by Two Source Magnetron Sputtering
Author :
Tanaka, M. ; Ohmi, F. ; Watada, A.
Author_Institution :
Technology Division, Ricoh Co., Ltd., Numazu.
Abstract :
The magnetic and magneto-optical properties of TbFeCo films formed on glass substrates by two-source (FeCo and Tb) magnetron sputtering, while varying the RF input power, Ar gas pressure, and subtrate rotation speed, are reported. By independent variation of the input power for the two sources, many different film compositions were obtained. The film Ms, perpendicular anisotropic energy K¿ and Kerr rotation angle ¿K were all fairly stable for substrate rotation speeds of 20 rpm or above, below this all three values increased as the speed was decreased.
Keywords :
Amorphous magnetic materials; Anisotropic magnetoresistance; Argon; Magnetic films; Magnetic materials; Perpendicular magnetic recording; Radio frequency; Saturation magnetization; Sputtering; Substrates;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1985.4548892