Optical Fiber Fabry–Pérot Pressure Sensor Based on a Polymer Structure

Author

Lihua Dai ; Ming Wang ; Dongyan Cai ; Hua Rong ; Jiali Zhu ; Sheng Jia ; Jingjing You

Author_Institution

Sch. of Phys. Sci. & Technol., Nanjing Normal Univ., Nanjing, China

Volume

25

Issue

24

fYear

2013

fDate

Dec.15, 2013

Firstpage

2505

Lastpage

2508

Abstract

A novel optical MEMS pressure sensor with a SU-8 microstructure is proposed. SU-8 photoresist is used to form the high aspect ratio structure on silicon wafer. The advantage of the novel structure mainly lies in the design of separating sensing membrane deformation with the length change of Fabry-Pérot cavity. The principle of the pressure measurement has been introduced. The mechanical model is analyzed and parameters of SU-8 structure are determined by simulation. The fabrication process is described. Experimental results demonstrate that the sensor has a reasonable linearity, sensitivity under micro-pressure measurement range from 0 to 0.1 MPa.

Keywords

deformation; elemental semiconductors; fibre optic sensors; membranes; micro-optomechanical devices; microfabrication; microsensors; optical design techniques; optical fibre fabrication; optical polymers; photoresists; pressure measurement; pressure sensors; silicon; Fabry-Perot cavity; SU-8 microstructure; SU-8 photoresist; Si; fabrication process; mechanical model; micropressure measurement; optical MEMS pressure sensor; optical fiber Fabry-Perot pressure sensor; polymer structure; pressure 0 MPa to 0.1 MPa; sensing membrane deformation; silicon wafer; Cavity resonators; Optical fiber sensors; Optical fibers; Optical interferometry; Polymers; Sensitivity; Silicon; Fabry–Pérot interferometer; SU-8 polymer; fiber optic sensor; lithography;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2013.2287289

Filename

6651750