Title :
Optical Fiber Fabry–Pérot Pressure Sensor Based on a Polymer Structure
Author :
Lihua Dai ; Ming Wang ; Dongyan Cai ; Hua Rong ; Jiali Zhu ; Sheng Jia ; Jingjing You
Author_Institution :
Sch. of Phys. Sci. & Technol., Nanjing Normal Univ., Nanjing, China
Abstract :
A novel optical MEMS pressure sensor with a SU-8 microstructure is proposed. SU-8 photoresist is used to form the high aspect ratio structure on silicon wafer. The advantage of the novel structure mainly lies in the design of separating sensing membrane deformation with the length change of Fabry-Pérot cavity. The principle of the pressure measurement has been introduced. The mechanical model is analyzed and parameters of SU-8 structure are determined by simulation. The fabrication process is described. Experimental results demonstrate that the sensor has a reasonable linearity, sensitivity under micro-pressure measurement range from 0 to 0.1 MPa.
Keywords :
deformation; elemental semiconductors; fibre optic sensors; membranes; micro-optomechanical devices; microfabrication; microsensors; optical design techniques; optical fibre fabrication; optical polymers; photoresists; pressure measurement; pressure sensors; silicon; Fabry-Perot cavity; SU-8 microstructure; SU-8 photoresist; Si; fabrication process; mechanical model; micropressure measurement; optical MEMS pressure sensor; optical fiber Fabry-Perot pressure sensor; polymer structure; pressure 0 MPa to 0.1 MPa; sensing membrane deformation; silicon wafer; Cavity resonators; Optical fiber sensors; Optical fibers; Optical interferometry; Polymers; Sensitivity; Silicon; Fabry–Pérot interferometer; SU-8 polymer; fiber optic sensor; lithography;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2013.2287289
