Passively aligned hybrid integration of 8 x 1 micromachined micro-Fresnel lens arrays and 8 x 1 vertical-cavity surface-emitting laser arrays for free-space optical interconnect

Author

Lee, S.S. ; Lin, L.Y. ; Pister, K.S.J. ; Wu, M.C. ; Lee, H.C. ; Grodzinski, P.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

Volume

7

Issue

9

fYear

1995

Firstpage

1031

Lastpage

1033

Abstract

Surface micromachining technique has been successfully applied to the fabrications of a three-dimensional 8/spl times/1 micro-Fresnel lens array and other novel three-dimensional alignment structures. With the help of these three-dimensional structures, self-aligned integration of the micro-Fresnel lens array and an 8/spl times/1 vertical-cavity surface-emitting laser (VCSEL) array is realized for the first time with passive alignment. Individual addressing of the VCSEL/micro-lens element is also successfully demonstrated. With their three-dimensional and array structural characteristics, they are very attractive for free-space optical interconnect and other integrated micro-optical systems.<>

Keywords

arrays; integrated optics; lenses; micromachining; optical fabrication; optical interconnections; semiconductor laser arrays; surface emitting lasers; 8 times 1 micromachined micro-Fresnel lens arrays; 8 times 1 vertical-cavity surface-emitting laser arrays; VCSEL; array structural characteristics; free-space optical interconnect; individual addressing; integrated micro-optical systems; passively aligned hybrid integration; self-aligned integration; surface micromachining technique; three-dimensional 8/spl times/1 micro-Fresnel lens array; three-dimensional alignment structures; Integrated optics; Laser beams; Lenses; Micromachining; Optical arrays; Optical beams; Optical device fabrication; Optical interconnections; Surface emitting lasers; Vertical cavity surface emitting lasers;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.414692

Filename

414692