Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation

Author

Lee, Hee-Chul ; Park, Jae-Yeong ; Bu, Jong-Uk

Author_Institution

Micro Syst. Group, LG Electron. Inst. of Technol., Seoul, South Korea

Volume

15

Issue

4

fYear

2005

fDate

4/1/2005 12:00:00 AM

Firstpage

202

Lastpage

204

Abstract

In this paper, fully integrated radio frequency (RF) microelectromechanical system (MEMS) switches with piezoelectric actuation have been proposed, designed, fabricated, and characterized. At a very low operation voltage of 2.5V, reliable and reproducible operation of the fabricated switch was obtained. The proposed RF MEMS switch is comprised of a piezoelectric cantilever actuator with a floated contact electrode and isolated CPW transmission line suspended above the silicon substrate. The measured insertion loss and isolation of the fabricated piezoelectric switch are -0.22 dB and -42dB at a frequency of 2GHz, respectively.

Keywords

coplanar waveguides; elemental semiconductors; microswitches; microwave switches; piezoelectric actuators; silicon; 0.22 dB; 2 GHz; 2.5 V; CPW transmission line; DC contact switches; RF MEMS switch; Si; floated contact electrode; fully integrated radio frequency microelectromechanical system switches; insertion loss; isolation; low voltage operation; piezoelectric actuation; piezoelectric cantilever actuator; silicon substrate; Contacts; Coplanar waveguides; Electrodes; Low voltage; Microelectromechanical systems; Micromechanical devices; Piezoelectric actuators; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Cantilever actuator; dc contact; low-voltage operation; piezoelectric; radio frequency (RF) microelectromechanical system (MEMS) switch;

fLanguage

English

Journal_Title

Microwave and Wireless Components Letters, IEEE

Publisher

ieee

ISSN

1531-1309

Type

jour

DOI

10.1109/LMWC.2005.845689

Filename

1416928