Title :
Effects of Substrate Degassing on Co-Cr Films in Continuous Fabrication by Sputtering
Author :
Iwasaki, S. ; Ouchi, K. ; Kimura, M.
Author_Institution :
Res. Inst. of Electrical Communication, Tohoku University.
Abstract :
The gas released from the substrate during continuous fabrication of Co-Cr recording media can seriously impair the perpendicular anisotropy of the Co-Cr film. Heat processing was performed to degas the substrate before sputtering to relieve this problem. Continuous fabrication after this preprocessing yielded Co-Cr films with high perpendicular anisotropy. Substrate heat degassing is not essential when double-layer film media is continuously fabricated at high speed.
Keywords :
Anisotropic magnetoresistance; Cooling; Fabrication; Heat treatment; Magnetic films; Perpendicular magnetic recording; Polyimides; Sputtering; Substrates; Temperature;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1985.4549020
