Title :
Frequency-Dependent Electrical and Thermal Response of Heated Atomic Force Microscope Cantilevers
Author :
Park, Keunhan ; Lee, Jungchul ; Zhang, Zhuomin M. ; King, William P.
Author_Institution :
George W. Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA
fDate :
4/1/2007 12:00:00 AM
Abstract :
This paper investigates the electrical and thermal response of the heated atomic force microscope (AFM) cantilevers in the frequency range from 10 Hz to 1 MHz. Spectrum analysis of the cantilever voltage response to periodic heating distinguishes different thermal behaviors of the cantilever in the frequency domain: the cantilever voltage at low frequencies is modulated by higher-order harmonics, and at high frequencies it oscillates with 1-omega only. A simple model facilitates the understanding of complicated electrical and thermal behaviors in the cantilever, thus, it is possible to determine the cantilever temperature. The calculation predicts that temperature oscillation is restricted to the heater region when the cantilever is operated at about 10 kHz, suggesting that the periodic-heating operation of the cantilever may be employed for highly sensitive thermal metrology
Keywords :
Raman spectroscopy; atomic force microscopy; cantilevers; frequency response; 10 to 1E6 Hz; Raman spectroscopy; atomic force microscope cantilevers; frequency response; spectrum analysis; temperature oscillation; thermal response; Atomic force microscopy; Frequency; Memory; Metrology; Noise measurement; Noise reduction; Resistance heating; Temperature sensors; Thermal force; Thermomechanical processes; Atomic force microscopy (AFM); Raman spectroscopy; electric variables measurement; frequency response;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2006.889498
