Structure and Annealing Effect of Co-CoO Sputtered Films

Film formed on a slide glass was annealed in a vacuum for five hours to investigate the effects of annealing on magnetic properties and film structure. The density of the Co high-density section near the film surface was found to be almost equal to that of the film fabricated in pure Ar gas, and this seems to be the origin of the observed increase in Ms and the decrease in Hc (¿) and Ku. Compared with measurements before annealing, the rising edges found from channel numbers 200 and 320 after annealiing are very steep, showing that separation between the Co and CoOx layers had progressed.