Title :
Integrated thin-film micropotentiometers
Author :
Kinard, J.R. ; Huang, D.X. ; Novotny, D.B.
Author_Institution :
Div. of Electr., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
fDate :
4/1/1995 12:00:00 AM
Abstract :
Integrated micropotentiometers, new devices fabricated with thin-film technology and the micromachining of silicon, have been developed for the accurate determination of ac voltage from 1 to 200 mV at frequencies from audio to 1 MHz and with the potential for higher frequencies
Keywords :
measurement standards; potentiometers; thin film devices; thin film resistors; voltage measurement; 1 MHz; 1 to 200 mV; Si; ac voltage; integrated thin-film micropotentiometers; micromachining; thin-film technology; Dielectric losses; Frequency; Micromachining; NIST; Nonhomogeneous media; Resistors; Semiconductor thin films; Silicon; Transistors; Voltage;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
