DocumentCode :
76708
Title :
Design, Fabrication, and Characterization of a 240
240 MEMS Uncooled Infrared Focal Plane Array With 42-
 focal plane array (FPA) with 42-μm pitch pixels. An improved analytical model has been developed to optimize the design. The optimal key parameters have been verified through experiments, including thermal transmission efficiency, thermomechanical sensitivity, thermal sensitivity, and response time. Compared with our previous work, the number of the fabricated FPA´s pixels is increased by 125% and the corresponding pixel´s area is decreased by 51%. Furthermore, our FPA has a good sensitivity with a noise equivalent temperature difference of about 373 mK, thus providing an extension of state-of-the-art IR FPA and practical information for future applications.</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Keywords : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>focal planes; infrared imaging; microfabrication; IR FPA; IR focal plane array; MEMS uncooled infrared focal plane array; microelectromechanical system uncooled infrared focal plane array; optimal key parameters; pitch pixel; response time; sensitivity; size 42 mum; thermal sensitivity; thermal transmission efficiency; thermomechanical sensitivity; Optical device fabrication; Optical imaging; Optical sensors; Sensitivity; Thermal conductivity; Time factors; Focal plane array (FPA); infrared (IR) imaging; microfabrication process; optical readout; response time; vacuum package;</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>fLanguage : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>English</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Journal_Title : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>Microelectromechanical Systems, Journal of</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Publisher : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>ieee</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>ISSN : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>1057-7157</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Type : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>jour</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>DOI : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>10.1109/JMEMS.2012.2227140</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Filename : </div><div class='valueDiv leftDirection leftAlign col-xs-8 col-sm-10 fullRecValueEnglish'>6362148</div>
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<div class='leftDiv labelDiv col-xs-4 col-sm-2 fullRecLabelEnglish'>Link To Document : </div><div class='valueDiv leftDirection leftAlign fullRecValueEnglish col-xs-8 col-sm-10'><a href='https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=76708' target='_blank'>https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=76708</a></div>
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