Title :
Slit Design Consideration on the Ferromagnetic RF Integrated Inductor
Author :
Yamaguchi, Masahiro ; Yamada, Keiju ; Kim, Ki Hyeon
Author_Institution :
Graduate Sch. of Eng., Tohoku Univ.
Abstract :
Five types of RF integrated spiral inductors were microfabricated and applied for the discussion of local anisotropy field distribution in the film and the local current distribution in the coil cross section, which strongly influences the frequency profile of the complex permeability, ferromagnetic resonance (FMR) frequency and inductance-capacitance (LC) resonance frequency. The shifted type inductor exhibited as high quality factor as 20.7 at 1.9 GHz because the local FMR frequency is the highest and the current distribution is most uniform among the test inductors
Keywords :
current distribution; ferromagnetic resonance; inductors; magnetic anisotropy; magnetic permeability; magnetic thin film devices; microwave devices; 1.9 GHz; anisotropy field distribution; coil cross section; current distribution; electromagnetic field simulation; ferromagnetic inductor; ferromagnetic resonance frequency; inductance-capacitance resonance frequency; integrated spiral inductors; permeability; quality factor; radiofrequency inductor; Anisotropic magnetoresistance; Coils; Current distribution; Inductors; Magnetic resonance; Permeability; Q factor; Radio frequency; Resonant frequency; Spirals; Complex permeability; RF integrated inductor; electromagnetic field simulation; ferromagnetic resonance (FMR) frequency; quality factor;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2006.879636
