• DocumentCode
    767806
  • Title

    Novel VOA using in-plane reflective micromirror and off-axis light attenuation

  • Author

    Chen, Chihchung ; Lee, Chengkuo ; Lai, Yen-Jyh

  • Volume
    41
  • Issue
    8
  • fYear
    2003
  • Abstract
    A new off-axis light attenuation configuration combining with a movable reflective micromirror is proposed for variable optical attenuator (VOA) application. Comprehensive study of new comb drive actuators of a two-step structure is done to achieve large displacement of an actuated micromirror for VOA. The measured optical and electrical performances have proven this new design promising for practical applications.
  • Keywords
    light absorption; light scattering; metropolitan area networks; microactuators; micromirrors; optical attenuators; optical communication equipment; optical variables control; power control; telecommunication control; MANs; VOA; WDM; actuated micromirror; comb drive actuators; in-plane reflective micromirror; metropolitan area networks; movable reflective micromirror; off-axis light attenuation; two-step structure; variable optical attenuator application; wavelength-division multiplexing; Electrodes; Electrostatic actuators; Micromachining; Micromechanical devices; Micromirrors; Optical attenuators; Optical coupling; Optical fiber polarization; Silicon on insulator technology; Springs;
  • fLanguage
    English
  • Journal_Title
    Communications Magazine, IEEE
  • Publisher
    ieee
  • ISSN
    0163-6804
  • Type

    jour

  • DOI
    10.1109/MCOM.2003.1222716
  • Filename
    1222716