Title :
Novel VOA using in-plane reflective micromirror and off-axis light attenuation
Author :
Chen, Chihchung ; Lee, Chengkuo ; Lai, Yen-Jyh
Abstract :
A new off-axis light attenuation configuration combining with a movable reflective micromirror is proposed for variable optical attenuator (VOA) application. Comprehensive study of new comb drive actuators of a two-step structure is done to achieve large displacement of an actuated micromirror for VOA. The measured optical and electrical performances have proven this new design promising for practical applications.
Keywords :
light absorption; light scattering; metropolitan area networks; microactuators; micromirrors; optical attenuators; optical communication equipment; optical variables control; power control; telecommunication control; MANs; VOA; WDM; actuated micromirror; comb drive actuators; in-plane reflective micromirror; metropolitan area networks; movable reflective micromirror; off-axis light attenuation; two-step structure; variable optical attenuator application; wavelength-division multiplexing; Electrodes; Electrostatic actuators; Micromachining; Micromechanical devices; Micromirrors; Optical attenuators; Optical coupling; Optical fiber polarization; Silicon on insulator technology; Springs;
Journal_Title :
Communications Magazine, IEEE
DOI :
10.1109/MCOM.2003.1222716
