Title :
A novel, single-mode piezoceramic plate actuator for ultrasonic linear motors
Author :
Vyshnevsky, O. ; Kovalev, Sergej ; Wischnewskiy, Wladimir
Author_Institution :
Physik Instrumente GmbH & Co. KG, Karlsruhe, Germany
Abstract :
A new type of piezoelectric plate actuator for ultrasonic linear motors has been developed. These new piezoelectric actuators use the principle of asymmetric resonant excitation of the piezoceramic plate in a special resonant mode consisting of a standing two-dimensional extensional wave in a piezoceramic plate. The behavior of the actuator has been simulated with finite-element method (FEM) software and the simulation results checked with single-point contact measurements on the surface of the actuator. This paper describes this work and closes by describing the new ultrasonic translation stages based on this design.
Keywords :
finite element analysis; linear motors; piezoceramics; piezoelectric actuators; ultrasonic motors; FEM software; asymmetric resonant excitation; finite-element method software; single-mode piezoceramic plate actuator; single-point contact measurements; two-dimensional extensional wave; ultrasonic linear motors; Finite element methods; Hydraulic actuators; Instruments; Piezoelectric actuators; Piezoelectric materials; Resonance; Rotors; Software measurement; Stators; Ultrasonic variables measurement; Ceramics; Computer Simulation; Computer-Aided Design; Electrochemistry; Equipment Design; Equipment Failure Analysis; Models, Theoretical; Motion; Reproducibility of Results; Sensitivity and Specificity; Transducers; Ultrasonography;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2005.1561674
