Title :
Characteristics of (101~0) and (112~0) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges
Author :
Yanagitani, Takahiko ; Nohara, Takuya ; Matsukawa, Mami ; Watanabe, Yoshiaki ; Otani, Takahiko
Author_Institution :
Fac. of Eng., Doshisha Univ., Kyoto, Japan
Abstract :
This paper reports the fabrication and characterization of ZnO piezoelectric thin films in which the crystallite c-axis is unidirectionally aligned in the plane. The films were deposited by a conventional radio frequency (RF) magnetron sputtering apparatus without epitaxy. We have measured reflection coefficient S/sub 11/ of the ZnO film/glass substrate composite shear mode resonator and confirmed that the resonator excites shear wave only in the very high frequency to ultra high frequency ranges (VHF-UHF). The crystallites c-axis orientation and alignment were determined by X-ray diffraction (XRD) patterns, /spl phi/-scan pole figure analysis, /spl omega/-scan rocking curves, and atomic force microscope (AFM) measurement. The transduction of the shear wave showed good agreement with properties of the crystallite alignment in the film.
Keywords :
II-VI semiconductors; X-ray diffraction; acoustic wave effects; atomic force microscopy; high-frequency effects; piezoelectric semiconductors; piezoelectric thin films; sputter deposition; zinc compounds; (101~0) textured piezofilms; (112~0) textured piezofilms; /spl omega/-scan rocking curves; /spl phi/-scan pole figure analysis; AFM; SiO/sub 2/; VHF-UHF frequency ranges; X-ray diffraction; XRD; ZnO; atomic force microscope; crystallite c-axis; piezoelectric thin films; radio frequency magnetron sputtering; reflection coefficient; shear mode resonator; transduction; Atomic force microscopy; Atomic measurements; Crystallization; Fabrication; Force measurement; Optical films; Piezoelectric films; Radio frequency; Sputtering; Zinc oxide; Ceramics; Computer Simulation; Equipment Design; Equipment Failure Analysis; Membranes, Artificial; Models, Theoretical; Radio Waves; Reproducibility of Results; Sensitivity and Specificity; Shear Strength; Stress, Mechanical; Transducers; Ultrasonography; Zinc Oxide;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2005.1561685
