Title :
Syntheses of Amorphous Gd-Co Sputtered Films with Anisotropy Modulated Superstructure
Author :
Nakamura, T. ; Kagami, S. ; Mariko, H. ; Yamamoto, H.
Author_Institution :
Graduate School of Nihon Univ., Funabashi
Abstract :
It was experimentally confirmed that when selective resputtering is performed only the atoms very near the surface layer are sputtered, agreeing well with theoretical predictions and computer calculations. A film with deposition film thickness td greater than composition change threshold thickness tc was found to be compositionally modulated with change in composition of about a few percent. The authors propose to call this new type of magnetic film an anisotropic modulated superstructure film.
Keywords :
Amorphous materials; Anisotropic magnetoresistance; Atomic layer deposition; Educational institutions; Magnetic films; Magnetic modulators; Magnetics Society; Radio frequency; Sputtering; Substrates;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1987.4549367