Multilayered Structures and Magnetic Properties of Fe-Si-Ru Multilayered Films

A method for controlling the domain structure by improving the multilayerization of Fe-Si-Ru alloy, Ni-Fe alloy and SiO₂ to improve the reproduction sensitivity of single-pole perpendicular magnetic heads. Measurements of the permeability of the Fe-Si-Ru multilayered film before and after patterning revealed that before patterning it was almost constant at 2200 up to an intermediate SiO₂ layer thickness of 30 nm, and that it decreased above that point, but after patterning, the permeability improved as the SiO₂ layer thickness increased and reached a maximum of 1000 at 20 nm.