• DocumentCode
    769147
  • Title

    Thickness Dependence of Effective Composition for Amorphous TbFe Films

  • Author

    Nakada, Af ; Toki, K. ; Okada, Af

  • Author_Institution
    Microelectronics Res. Labs., NEC Corporation.
  • Volume
    2
  • Issue
    4
  • fYear
    1987
  • fDate
    4/1/1987 12:00:00 AM
  • Firstpage
    348
  • Lastpage
    349
  • Abstract
    An attempt is made to explain the deviation to the Fe-rich side of the ``effective´´ composition of RF sputtered, amorphous TbFe films. The results indicate that the effective composition apparently varies as a function of film thickness, and this cannot be explained using the present model. A thin boundary-layer model is proposed which assumes: 1) these layers are formed at both the film-substrate and film-air boundaries; 2) this layer thickness is independent of the total film thickness; and 3) there are exchange couplings between the boundary layer and the middle layer.
  • Keywords
    Amorphous materials; Etching; Glass; Helium; Magnetic films; Magnetooptic effects; Plastics; Radio frequency; Sputtering; Substrates;
  • fLanguage
    English
  • Journal_Title
    Magnetics in Japan, IEEE Translation Journal on
  • Publisher
    ieee
  • ISSN
    0882-4959
  • Type

    jour

  • DOI
    10.1109/TJMJ.1987.4549437
  • Filename
    4549437