DocumentCode
769147
Title
Thickness Dependence of Effective Composition for Amorphous TbFe Films
Author
Nakada, Af ; Toki, K. ; Okada, Af
Author_Institution
Microelectronics Res. Labs., NEC Corporation.
Volume
2
Issue
4
fYear
1987
fDate
4/1/1987 12:00:00 AM
Firstpage
348
Lastpage
349
Abstract
An attempt is made to explain the deviation to the Fe-rich side of the ``effective´´ composition of RF sputtered, amorphous TbFe films. The results indicate that the effective composition apparently varies as a function of film thickness, and this cannot be explained using the present model. A thin boundary-layer model is proposed which assumes: 1) these layers are formed at both the film-substrate and film-air boundaries; 2) this layer thickness is independent of the total film thickness; and 3) there are exchange couplings between the boundary layer and the middle layer.
Keywords
Amorphous materials; Etching; Glass; Helium; Magnetic films; Magnetooptic effects; Plastics; Radio frequency; Sputtering; Substrates;
fLanguage
English
Journal_Title
Magnetics in Japan, IEEE Translation Journal on
Publisher
ieee
ISSN
0882-4959
Type
jour
DOI
10.1109/TJMJ.1987.4549437
Filename
4549437
Link To Document