Title :
Preparation of Magneto-Optical Disks Using RE-TM Alloy Targets
Author :
Asaka, T. ; Asari, S. ; Ota, Y. ; Nakamura, K. ; Itoh, A.
Author_Institution :
Institute for Super Materials, ULVAC Corporation.
fDate :
4/1/1987 12:00:00 AM
Abstract :
The characteristics of two very common targets (TbFeCo and TbCo alloys) were evaluated and it was learned that sputtering such alloy targets varies the sample composition, but target oxygen content has no effect on the magnetic characteristics.
Keywords :
Coercive force; Electrons; Fluorescence; Magnetic analysis; Magnetic films; Magnetooptic effects; Magnetooptic recording; Spectroscopy; Sputtering; Substrates;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1987.4549438