DocumentCode :
769674
Title :
High Frequency Permeability of CoNbZr Thin Films Prepared by Tetrode Sputtering Method
Author :
Koyama, H. ; Tsujimoto, H. ; Shirae, K.
Author_Institution :
Osaka University.
Volume :
2
Issue :
5
fYear :
1987
fDate :
5/1/1987 12:00:00 AM
Firstpage :
456
Lastpage :
457
Abstract :
A new strip-line method for measuring the permeability of CoNbZr thin films at high frequencies (1 ~ 400 MHz) is discussed. Low-frequency measurements (less than 1 MHz) are possible using a coil, but this is impossible at higher frequencies because of the resonance between the coil windings. The strip-line method employs a section of the film sample (in this case 13 mm × 55 mm × 1 ¿m), a glass epoxy spacer, a glass substrate and a 4191A measuring instrument. Smaller samples (13 × 13 mm) were also tested, but greater film volumes provided better accuracy.
Keywords :
Coils; Frequency measurement; Glass; Magnetic field measurement; Magnetic films; Magnetic resonance; Permeability measurement; Sputtering; Substrates; Transistors;
fLanguage :
English
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
Publisher :
ieee
ISSN :
0882-4959
Type :
jour
DOI :
10.1109/TJMJ.1987.4549488
Filename :
4549488
Link To Document :
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