Title :
Surface Protective Film for CoNiCr/Cr Sputter Hard Disks
Author :
Tani, N. ; Yamada, T. ; Ishikawa, M. ; Ota, Y. ; Nakamura, K. ; Itoh, A.
Author_Institution :
ULVAC Corp.
fDate :
6/1/1987 12:00:00 AM
Abstract :
Surface protective films for hard disk media were studied. Whereas sputtered carbon films are not sufficiently wear-resistant for use with CaTiO3 and Al2O3. TiC head sliders, tests using plasma-CVD films prepared in acetylene gas under RF or dc discharge have lubricating properties and sufficient wear resistance, but are so soft that disk surfaces are easily damaged. By combining the two in a double-layer protective film, however, both good wear resistance and low friction when used with the above types of heads are achieved.
Keywords :
Chromium; Ferrite films; Friction; Hard disks; Magnetic films; Magnetic heads; Plasma properties; Protection; Sputtering; Surface resistance;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1987.4549532