Title :
Enhancement-Mode n-Channel GaN MOSFETs on p and n-GaN/Sapphire Substrates
Author :
Huang, W. ; Khan, T. ; Chow, T.P.
Author_Institution :
Center for Power Electron. Syst., Rensselaer Polytech. Inst., Troy, NY
Abstract :
We report on the demonstration of enhancement-mode n-channel GaN high-voltage MOSFET realized on both p and n-GaN epilayer on sapphire substrates. These MOSFETs, with linear and circular gate geometries, show good dc characteristics with maximum field-effect mobility of 167 cm2/Vmiddots, best reported to date
Keywords :
III-V semiconductors; MOCVD; MOSFET; gallium compounds; high-voltage engineering; sapphire; wide band gap semiconductors; GaN-Al2O3; enhancement mode MOSFET; field-effect mobility; metal organic chemical vapor deposition; sapphire; Annealing; Dielectric substrates; Fabrication; Gallium nitride; HEMTs; MODFETs; MOSFETs; Silicon carbide; Thermal conductivity; Voltage; Enhancement-mode; MOSFET; gallium nitride; high field-effect mobility;
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2006.883054