Title :
Co Ferrite Films by Evaporation Technique in O2 Plasma
Author :
Tanaka, F. ; Imamura, N. ; Ogawa, T. ; Itoh, A.
Author_Institution :
KDD Research and Development Lab.
Abstract :
Growth of Co ferrite film by evaporating FeCo alloy in an oxygen plasma was studied. Film grown on glass substrates was polycrystaline with a (100) axis preferential orientation. Film formed on spinel substrate showed epitaxial growth on the (100) axis, and there was a slight difference with the observed bulk diffraction angle. This seems to be due to oxygen deficiency, since compensating for it eliminated the difference. Oxidation of the films formed on the glass substrates due to heat treatment and stress resulted in the films being perpendicularly magnetized as the saturation magnetization increased.
Keywords :
Cobalt alloys; Diffraction; Epitaxial growth; Ferrite films; Glass; Heat treatment; Oxidation; Plasmas; Saturation magnetization; Substrates;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1987.4549628