DocumentCode
771479
Title
Structure and Magnetic Properties of FeCr Sputtered Films
Author
Oda, S. ; Ohkoshi, M. ; Kusuda, T.
Author_Institution
Hiroshima Univ.
Volume
2
Issue
11
fYear
1987
Firstpage
1005
Lastpage
1007
Abstract
The structure and magnetic properties of FeCr sputtered films were studied, and the conditions for perpendicular magnetic anisotropy investigated. Results indicated that films sputtered at an input power of 200 W were bcc, but at lower input powers a ¿ phase appeared, and films had a perpendicular anisotropy, possibly due to an observed columnar microstructure. When a focusing magnetic field was applied during sputtering, there was less bcc phase material and more of the ¿ phase.
Keywords
Anisotropic magnetoresistance; Chromium; Magnetic fields; Magnetic films; Magnetic properties; Magnetization; Microstructure; Plasma temperature; Substrates; X-ray diffraction;
fLanguage
English
Journal_Title
Magnetics in Japan, IEEE Translation Journal on
Publisher
ieee
ISSN
0882-4959
Type
jour
DOI
10.1109/TJMJ.1987.4549666
Filename
4549666
Link To Document