Columnar Structure in Continuously Sputtered Co-Cr Films

Co-Cr films were continuously formed on a substrate film in motion by DC planar magnetron sputtering, and the effect on the columnar microstructure of films was investigated. Columnar grains were bow-shaped owing to the change in angle of incidence ¿ of sputtered particles, in contrast with films formed on a stationary substrate; but the extent of change in ¿ had little effect. These results can be approximated using a vector sum representing sputtering from two line sources.