Bi-Substituted Garnet Films For Magneto-Optic Memory -Sputter Opposition In Ar-H2 Gas-

The relation between film characteristics and oxygen deficits was investigated. The amount of Bi in the film drastically decreased with increase in the amount of hydrogen. This may be due to the weakness of the Bi affinity to oxygen. The X-ray diffraction intensity of film produced by introducing hydrogen at 5% of Ar is significantly weaker than that for film grown in pure Ar. Film grown in Ar + H2 showed improved optical homogeneity at the crystal grain boundaries resulting in large reduction in light intensity variation coming close to that of the amorphous film.