DocumentCode
772199
Title
Modeling of drain current overshoot and recombination lifetime extraction in floating-body submicron SOI MOSFETs
Author
Munteanu, Daniela ; Ionescu, Adrian-Mihai
Author_Institution
Lab. for Mater. & Microelectron. of Provence, Marseille, France
Volume
49
Issue
7
fYear
2002
fDate
7/1/2002 12:00:00 AM
Firstpage
1198
Lastpage
1205
Abstract
This work reports on a new general modeling of recombination-based mechanisms related to electrically floating-body partially-depleted (PD) SOI MOSFETs. The model describes drain current overshoots induced when turning on the transistor gate and suggests a novel extraction method for the recombination lifetime in the silicon film. We show that the recombination process associated with drain current overshoots in PD silicon-on-insulator (SOI) MOSFETs takes place mainly in the depletion region and not in the neutral region as in case of pulsed MOS capacitors. Associated with existing techniques for generation lifetime extraction, our model offers, for the first time, the possibility of complete and rapid characterization for both generation and recombination lifetime using drain current transients in floating-body SOI MOSFETs. The model is used in order to characterize submicron SOI devices, allowing a thorough investigation of technological parameters impact on floating-body-induced transient mechanisms
Keywords
MOSFET; carrier lifetime; electron-hole recombination; semiconductor device models; silicon-on-insulator; Si; depletion region; drain current overshoot modeling; drain current transients; floating-body submicron SOI MOSFETs; floating-body-induced transient mechanisms; generation lifetime; recombination lifetime extraction; technological parameters; Character generation; Charge carrier lifetime; Data mining; Laboratories; MOS capacitors; MOSFETs; Semiconductor films; Silicon on insulator technology; Spontaneous emission; Turning;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2002.1013276
Filename
1013276
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