Title :
Resonator size effects on the TFBAR ladder filter performance
Author :
Kim, Kun-Wook ; Gu, Myeong-Gweon ; Yook, Jong-Gwan ; Park, Han-Kyu
Author_Institution :
Dept. of Electr. & Electr. Eng., Yonsei Univ., Seoul, South Korea
Abstract :
Thin-film bulk acoustic resonators with different resonator sizes are simulated and measured. Their effects on ladder filter performance are also presented. Aluminum nitride and platinum are used as piezoelectric material and electrodes, respectively. As the shunt resonator size increases, out-of-band rejection performance has been improved. The 3/2 stage filters that have twice or three times larger resonators reveal 6 dB and 11 dB out-of-band rejection improvements, respectively.
Keywords :
S-parameters; acoustic resonator filters; bulk acoustic wave devices; frequency response; ladder filters; RF MEMS; frequency response; ladder filter performance; out-of-band rejection performance; resonator size effect; series resonator; shunt resonator; thin film piezoelectric; thin-film bulk acoustic resonators; Air gaps; Aluminum nitride; Band pass filters; Electrodes; Film bulk acoustic resonators; Levee; Piezoelectric materials; Radio frequency; Resonator filters; Zinc oxide;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2003.815689
