• DocumentCode
    772526
  • Title

    Introduction to the special issue on micromachined ultrasonic transducers

  • Author

    Khuri-Yakub, B.T.

  • Volume
    52
  • Issue
    12
  • fYear
    2005
  • Firstpage
    2162
  • Lastpage
    2162
  • Abstract
    This special issue attempts to offer a number of articles that span a comprehensive list of topics of interest in the development of the micromachined transducer. A lot of good development in modeling and implementation has taken place in 10 years, but more, much more needs to be done to bring about a complete understanding of these devices. It is hoped that this issue will help encourage more research and development in this field to help realize the full potential of the micromachined ultrasonic transducers.
  • Keywords
    Biomembranes; Capacitors; Integrated circuit manufacture; Magnetic materials; Micromachining; Piezoelectric transducers; Silicon; Special issues and sections; Ultrasonic imaging; Ultrasonic transducers;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/TUFFC.2005.1563259
  • Filename
    1563259