DocumentCode
772526
Title
Introduction to the special issue on micromachined ultrasonic transducers
Author
Khuri-Yakub, B.T.
Volume
52
Issue
12
fYear
2005
Firstpage
2162
Lastpage
2162
Abstract
This special issue attempts to offer a number of articles that span a comprehensive list of topics of interest in the development of the micromachined transducer. A lot of good development in modeling and implementation has taken place in 10 years, but more, much more needs to be done to bring about a complete understanding of these devices. It is hoped that this issue will help encourage more research and development in this field to help realize the full potential of the micromachined ultrasonic transducers.
Keywords
Biomembranes; Capacitors; Integrated circuit manufacture; Magnetic materials; Micromachining; Piezoelectric transducers; Silicon; Special issues and sections; Ultrasonic imaging; Ultrasonic transducers;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/TUFFC.2005.1563259
Filename
1563259
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