Title :
Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane
Author :
Yanagitani, Takahiko ; Mishima, Natsuki ; Matsukawa, Mami ; Watanabe, Yoshiaki
Author_Institution :
Fac. of Eng., Doshisha Univ., Kyoto
fDate :
4/1/2007 12:00:00 AM
Abstract :
The (112macr0) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k15 are obtained by sputter deposition. An overmoded resonator, a layered structure of metal electrode film/(112macr0) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k15 by a resonant spectrum method. The (112macr0) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k15 of 0.24. This value was 92% of k15 value in single-crystal (k15 = 0.26)
Keywords :
acoustic resonators; bulk acoustic wave devices; piezoelectric materials; piezoelectric thin films; piezoelectricity; sputter deposition; texture; zinc compounds; (112macr0) textured piezoelectric film; Cu-ZnO-Al-SiO2; Cu-ZnO-Cu-SiO2; SiO2; electromechanical coupling coefficient; metal electrode film; resonant spectrum method; silica glass substrate; sputter deposition; Crystallization; Electrodes; Film bulk acoustic resonators; Frequency; Piezoelectric films; Resonance; Sputtering; Substrates; Temperature; Zinc oxide;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2007.303
