Evolution of Argon Discharges in Bottle-Shaped Tube Excited by Surface Plasmon Polaritons With a Low Power Operation

Author

Ming Chen ; Junfeng Chen ; Pei Liu ; Zhen Zheng ; Minghai Liu

Author_Institution

State Key Lab. of Adv. Electromagn. Eng. & Technol., Huazhong Univ. of Sci. & Technol., Wuhan, China

Volume

42

Issue

10

fYear

2014

fDate

Oct. 2014

Firstpage

2838

Lastpage

2839

Abstract

In this paper, an improved microwave plasma jet based on the principles of surface plasmon polaritons is exhibited. Instead of the traditional capillary discharge, a bottle-shaped discharge tube is designed. An interesting discharge phenomenon that the discharge state changes from glow discharge to the filamentary streamers along the inner wall of the tube is found when the pressure increases. This may have a promising application prospect for the large-area surface processing.

Keywords

argon; glow discharges; high-frequency discharges; plasma jets; argon discharges; bottle-shaped discharge; bottle-shaped tube; capillary discharge; discharge phenomenon; discharge state; filamentary streamers; glow discharge; large-area surface processing; microwave plasma jet; surface plasmon polaritons; Argon; Discharges (electric); Electron tubes; Plasmons; Surface discharges; Surface treatment; Filamentary streamers; microwave plasma jet; surface plasmon polaritons; surface plasmon polaritons.;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2014.2331249

Filename

6847225