Title :
Application of Taguchi robust design method to SAW mass sensing device
Author :
Wu, Der Ho ; Chen, Hsin Hua
Author_Institution :
Dept. of Mech. Eng., Nat. Pingtung Univ. of Sci. & Technol., Taiwan
Abstract :
It is essential that measurement systems provide an accurate and robust performance over a wide range of input conditions. This paper adopts Taguchi´s signal-to-noise ratio (SNR) analysis to develop a robust design for the Rayleigh surface acoustic wave (SAW) gas sensing device operated in a conventional delay-line configuration. The goal of the present Taguchi design activity is to increase the sensitivity of this sensor while simultaneously reducing its variability. A time- and cost-efficient finite-element analysis method is used to investigate the effects on the sensor´s response output of variations in the carbon dioxide (CO/sub 2/) gas deposited mass. The simulation results for the resonant frequency and wave mode analysis are all shown to be in good agreement with the values predicted theoretically.
Keywords :
Rayleigh waves; Taguchi methods; finite element analysis; surface acoustic wave devices; Rayleigh surface acoustic wave; SAW mass sensing device; Taguchi robust design method; carbon dioxide gas; delay-line configuration; finite-element analysis method; signal-to-noise ratio analysis; wave mode analysis; Acoustic measurements; Acoustic sensors; Acoustic waves; Design methodology; Robustness; Signal analysis; Signal design; Signal to noise ratio; Surface acoustic wave devices; Surface acoustic waves; Carbon Dioxide; Computer Simulation; Computer-Aided Design; Electrochemistry; Equipment Design; Equipment Failure Analysis; Microelectrodes; Models, Theoretical; Numerical Analysis, Computer-Assisted; Transducers; Ultrasonography;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2005.1563284
