• DocumentCode
    773558
  • Title

    Universal system for photoelectric characterisation of semiconductor structures

  • Author

    Porebski, S. ; Machalica, P. ; Zajac, J. ; Borowicz, L. ; Kudla, A. ; Przewlocki, H.M.

  • Author_Institution
    Ind. Inst. of Electron., Warsaw, Poland
  • Volume
    150
  • Issue
    4
  • fYear
    2003
  • fDate
    7/3/2003 12:00:00 AM
  • Firstpage
    148
  • Lastpage
    152
  • Abstract
    A multifunctional system for the photoelectric measurement of semiconductor structures (MSPM) is presented. The system enables very accurate photocurrent measurements to be taken at levels as low as 10 fA. Measured structures can be biased by sequences of DC voltages and stimulated by light beams of predefined wavelengths and powers. The software controls all the system actions allowing flexibility in retrieving data stored in the related databases.
  • Keywords
    photoelectricity; semiconductors; 10 fA; MSPM system; multifunctional system; photoelectric measurement; semiconductor structure;
  • fLanguage
    English
  • Journal_Title
    Science, Measurement and Technology, IEE Proceedings -
  • Publisher
    iet
  • ISSN
    1350-2344
  • Type

    jour

  • DOI
    10.1049/ip-smt:20030623
  • Filename
    1226522
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=773558