Charging effect of Si nanocrystals in gate oxide near gate on MOS capacitance

MOS structure with Si nanocrystals embedded in the gate oxide close to the gate has a much larger capacitance compared to a similar MOS structure without the nanocrystals. However, charge trapping in the nanocrystals reduces the capacitance dramatically, and after most of the nanocrystals are charged up the capacitance is much smaller than that of the MOS structure without nanocrystals. An equivalent-capacitance model is proposed to explain the phenomena observed.