Title :
Half-coaxial-like transmission line using benzo cyclo butene layer
Author :
Kim, J.-M. ; Cheon, C. ; Kwon, Y. ; Kim, Y.K.
Author_Institution :
Div. of Electron. & Inf. Eng., Chonbuk Nat. Univ., Jeonju
Abstract :
A simple and successful design for a half-coaxial-like transmission line using benzo cyclo butene (BCB) is presented. The proposed half-coaxial transmission line was fabricated using a conventional surface micromachining without additional removal of the sacrificial layer. The measured half-coaxial transmission line showed less than 1 dB/cm loss at 20 GHz. Simulated results using CPW modelling are compared with measured data and good agreement is reported.
Keywords :
coplanar transmission lines; coplanar waveguides; micromachining; microwave devices; organic compounds; surface treatment; CPW modelling; benzo cyclo butene layer; frequency 20 GHz; half-coaxial-like transmission line design; loss value; surface micromachining;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20080973
