• DocumentCode
    774231
  • Title

    3-inch single-crystal LiTaO3films onto metallic electrode using Smart CutTMtechnology

  • Author

    Tauzin, A. ; Dechamp, J. ; Madeira, F. ; Mazen, F. ; Zussy, M. ; Deguet, C. ; Clavelier, L. ; Moulet, J.-S. ; Richtarch, C. ; Akatsu, T. ; Yoshimi, M. ; Rigny, A.

  • Author_Institution
    CEA-DRT-LETL, CEA/GRE, Grenoble
  • Volume
    44
  • Issue
    13
  • fYear
    2008
  • Firstpage
    822
  • Lastpage
    824
  • Abstract
    The Smart CutTM technology has been used for LiTaO3 layer transfer. A 3-inch full wafer single-crystal LiTaO3 layer onto a carrier wafer comprising a metallic electrode is reported.
  • Keywords
    electrodes; ferroelectric thin films; lanthanum compounds; 3-inch full wafer crystals; LiTaO3-Cr-SiO2-LiTaO3; Smart CutTM technology; ferroelectric material; ferroelectric properties; metallic electrode; thin films;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20081057
  • Filename
    4550710
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=774231