A novel offset gated polysilicon thin film transistor without an additional offset mask

We have proposed a novel offset gated polysilicon TFT fabricated without an offset mask in order to reduce leakage current and suppress the kink effect. The photolithographic process steps of the new TFT device are identical to those of conventional non-offset structure TFT´s and an additional mask to fabricate an offset structure is not required in our device. The new device has demonstrated a lower leakage current and a better ON/OFF current ratio compared with the conventional non-offset device. The novel TFT also exhibits a considerable reduction in the kink effect because a very thin film TFT may be easily fabricated due to the elimination of the contact over-etch problem.<>