A Novel Six Degrees-of-Freedom Parallel Robot for MEMS Fabrication

Author

Bamberger, Hagay ; Shoham, Moshe

Author_Institution

Armament Dev. Authority Ltd, RAFAEL, Haifa

Volume

23

Issue

2

fYear

2007

fDate

4/1/2007 12:00:00 AM

Firstpage

189

Lastpage

195

Abstract

This paper introduces a new architecture of a six degrees-of-freedom parallel robot suitable for microelectromechanical systems (MEMS) fabrication. The robot consists of only revolute joints for the passive joints, and linear actuators located at the base for the active ones, both of which are easier to manufacture in MEMS technology. The hybrid kinematic structure contains three single-loop submechanisms connected in parallel to the moving platform. The solutions of the inverse and direct kinematics problems are presented

Keywords

actuators; fasteners; industrial manipulators; manipulator kinematics; micromanipulators; MEMS fabrication; hybrid kinematic structure; linear actuators; microelectromechanical systems; passive joints; revolute joints; single-loop submechanisms; six degrees-of-freedom parallel robot; Associate members; Fabrication; Fasteners; Hydraulic actuators; Kinematics; Micromachining; Micromechanical devices; Parallel robots; Robotics and automation; Silicon; Microactuators; microelectromechanical devices; parallel mechanism; robot kinematics;

fLanguage

English

Journal_Title

Robotics, IEEE Transactions on

Publisher

ieee

ISSN

1552-3098

Type

jour

DOI

10.1109/TRO.2006.889493

Filename

4154818