Title :
Coupling efficiency control of vertically coupled microring resonator filter by microactuator
Author :
Sekiguchi, G. ; Kobayashi, N. ; Kokubun, Y.
Author_Institution :
Dept. of Electr. & Comput. Eng., Yokohama Nat. Univ.
Abstract :
Coupling efficiency control of vertically coupled microring resonator was successfully realized by microactuator, which is suitable for the simultaneous integration of microelectromechanical systems switch and thermooptic tunable filter. The extinction ratio of drop port response of 15.1 dB, through port response of 2.1 dB, and switching time of 60 mus were demonstrated at the applied voltage of 350 V. The loss of through port response in the off-state was reduced to 0.8 dB
Keywords :
micro-optics; microactuators; micromechanical resonators; microswitches; optical control; optical couplers; optical filters; optical resonators; optical switches; thermo-optical devices; 350 V; 60 mus; coupling efficiency control; extinction ratio; microactuator; microelectromechanical systems; thermooptic tunable filter; vertically coupled microring resonator filter; Control systems; Extinction ratio; Microactuators; Microelectromechanical systems; Optical coupling; Optical filters; Optical resonators; Optical waveguides; Resonator filters; Switches; Coupling efficiency; high index contrast; microactuator; microring; optical waveguide; wavelength switch;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2006.883167
