Title :
Preparation and gas-sensing characteristics of nanocrystalline spinel zinc ferrite thin films
Author :
Jiao, Zheng ; Wu, Minghong ; Gu, Jianzhong ; Qin, Zheng
Author_Institution :
Shanghai Appl. Radiat. Inst., Shanghai Univ., China
Abstract :
Zinc ferrite is a promising sensor material. In this paper, thin films of nanocrystalline zinc ferrite were deposited on alumina substrates by nebulization of a 0.01-M solution of a mixture of ZnCl2 and FeCl3 in ethanol (Zn:Fe=1:2) followed by pyrolysis and annealing in flowing air. The resulting films were characterized by X-ray diffraction and scanning electron microscopy, and the gas-sensing properties of as-deposited films were also investigated.
Keywords :
X-ray diffraction; annealing; ferrites; gas sensors; materials preparation; nanostructured materials; pyrolysis; scanning electron microscopy; thin films; zinc compounds; Al2O3; FeCl3; SEM; X-ray diffraction; ZnCl2; ZnFe2O4-Al2O3; alumina substrates; annealing; ethanol; flowing air; gas-sensing characteristics; nanocrystalline spinel Zn ferrite thin films; nebulization; scanning electron microscopy; sensor material; spray pyrolysis; Ferrite films; Gas detectors; Scanning electron microscopy; Semiconductor materials; Semiconductor thin films; Spraying; Sputtering; Thin film sensors; Transistors; Zinc;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2003.815941
