Title :
Particle-in-cell simulation of ion flow through a hole in contact with plasma
Author :
Nam, Sang Ki ; Donnelly, Vincent M. ; Economou, Demetre J.
Author_Institution :
Dept. of Chem. Eng., Houston Univ., TX, USA
fDate :
4/1/2005 12:00:00 AM
Abstract :
Images from a particle-in-cell (PIC) simulation of ion flow through a hole in contact with plasma are presented. When the hole size is comparable to or larger than the plasma sheath thickness, the emanating ion beam is strongly divergent. In the opposite extreme of small hole size, a collimated ion beam may be extracted.
Keywords :
plasma flow; plasma sheaths; plasma simulation; ion beam; ion flow; particle-in-cell simulation; plasma sheath; Computational modeling; Electrons; Ion beams; Particle beams; Plasma applications; Plasma density; Plasma materials processing; Plasma sheaths; Plasma simulation; Radio frequency; Ion angular distribution; ion beams; particle-in-cell; plasma molding; simulation;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845109