Title :
Columnar diamond film coverage of vacuum arc erosion canyons on graphite
Author :
Meunier, J.-L. ; Kandah, M. ; Campbell, M.
Author_Institution :
Dept. of Chem. Eng., McGill Univ., Montreal, Que., Canada
fDate :
4/1/2005 12:00:00 AM
Abstract :
Vacuum arcs are generated on dense graphite materials with enhanced local plasma density leading to strong improvement in arc mobility and stability. Observations of cross sections of the arc canyon erosion trace reveals erosion craters covered with a porous columnar film having a diamond structure. Scanning electron microscope (SEM) images of this growth structure are presented at various resolutions.
Keywords :
diamond; graphite; plasma density; plasma instability; plasma materials processing; plasma transport processes; porous materials; scanning electron microscopy; vacuum arcs; vacuum deposited coatings; C; arc mobility; arc stability; columnar diamond film; enhanced local plasma density; erosion craters; graphite; porous columnar film; scanning electron microscope; vacuum arc erosion canyons; Atherosclerosis; Cathodes; Plasma confinement; Plasma density; Plasma devices; Plasma materials processing; Plasma sources; Scanning electron microscopy; Substrates; Vacuum arcs; Arc discharges; CVD; PVD; cathode spots; cathodes; crystal growth; diamond; diamondlike films; graphite; plasma arc devices;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845146
