Title :
Dendritic platinum aggregates produced in the plasma assisted chemical vapor deposition of tin oxide thin films
Author :
Pulpytel, Jerome ; Etienne, Camille Petit ; Arefi-Khonsari, Farzanneh
Author_Institution :
Lab. de Gemie des Procedes Plasmas et Traitements de Surface, Paris, France
fDate :
4/1/2005 12:00:00 AM
Abstract :
The formation of platinum fractal-like structures obtained by the decomposition of platinum acetylacetonate entrapped in the plasma assisted chemical vapor deposition (PACVD) of tin oxide thin films is shown. The platinum aggregates, thus formed, show a dendritic structure of fractal dimension D≈1.1-1.6, depending on the experimental conditions.
Keywords :
aggregates (materials); decomposition; dendrites; dendritic structure; fractals; plasma CVD; platinum; thin films; tin compounds; SnO2:Pt; decomposition; dendritic platinum aggregates; plasma assisted chemical vapor deposition; platinum acetylacetonate; platinum fractal-like structures; tin oxide thin films; Aggregates; Chemical vapor deposition; Electrodes; Fractals; Plasma chemistry; Platinum; Radio frequency; Sputtering; Surface morphology; Tin; Gas sensors; PACVD; platinum dendrites; tin oxide;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845337
