• DocumentCode
    775305
  • Title

    Visualization of interactions between organic polymer surfaces and ion beams obtained from molecular dynamics Simulations

  • Author

    Yamada, Hideaki ; Hamaguchi, Satoshi

  • Author_Institution
    Diamond Res. Center, Nat. Inst. of Adv. Ind. Sci. & Technol., Osaka, Japan
  • Volume
    33
  • Issue
    2
  • fYear
    2005
  • fDate
    4/1/2005 12:00:00 AM
  • Firstpage
    246
  • Lastpage
    247
  • Abstract
    Molecular dynamics simulation combined with sophisticated visualization techniques may be one of the most powerful scientific tools for the study of atomic-level surface reactions during plasma-wall interactions. This paper shows visualization of an organic polymer model substrate before and during molecular beam injections. The classical interatomic potential model functions used in the present work are developed to describe chemical reactions, i.e., formation and breakup of chemical bonds under strongly nonthermal-equilibrium conditions. We have observed that, during beam injections, nonthermal-equilibrium chemical reactions take place in a nano-scale thin layer of the substrate top surface, which determines characteristics of the process, such as etching/deposition rates and selectivity.
  • Keywords
    bonds (chemical); molecular beams; plasma chemistry; plasma materials processing; plasma simulation; plasma-wall interactions; polymers; potential energy functions; surface chemistry; atomic-level surface reactions; chemical bonds; classical interatomic potential; deposition rates; etching; ion beams; molecular beam injections; molecular dynamics simulations; nanoscale thin layer; nonthermal-equilibrium chemical reactions; organic polymer surface visualization; plasma-wall interactions; selectivity; substrate top surface; Etching; Ion beams; Organic materials; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma simulation; Polymers; Substrates; Visualization; Molecular dynamics simulation; organic polymers; plasma processing;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2005.845358
  • Filename
    1420419