DocumentCode
775305
Title
Visualization of interactions between organic polymer surfaces and ion beams obtained from molecular dynamics Simulations
Author
Yamada, Hideaki ; Hamaguchi, Satoshi
Author_Institution
Diamond Res. Center, Nat. Inst. of Adv. Ind. Sci. & Technol., Osaka, Japan
Volume
33
Issue
2
fYear
2005
fDate
4/1/2005 12:00:00 AM
Firstpage
246
Lastpage
247
Abstract
Molecular dynamics simulation combined with sophisticated visualization techniques may be one of the most powerful scientific tools for the study of atomic-level surface reactions during plasma-wall interactions. This paper shows visualization of an organic polymer model substrate before and during molecular beam injections. The classical interatomic potential model functions used in the present work are developed to describe chemical reactions, i.e., formation and breakup of chemical bonds under strongly nonthermal-equilibrium conditions. We have observed that, during beam injections, nonthermal-equilibrium chemical reactions take place in a nano-scale thin layer of the substrate top surface, which determines characteristics of the process, such as etching/deposition rates and selectivity.
Keywords
bonds (chemical); molecular beams; plasma chemistry; plasma materials processing; plasma simulation; plasma-wall interactions; polymers; potential energy functions; surface chemistry; atomic-level surface reactions; chemical bonds; classical interatomic potential; deposition rates; etching; ion beams; molecular beam injections; molecular dynamics simulations; nanoscale thin layer; nonthermal-equilibrium chemical reactions; organic polymer surface visualization; plasma-wall interactions; selectivity; substrate top surface; Etching; Ion beams; Organic materials; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma simulation; Polymers; Substrates; Visualization; Molecular dynamics simulation; organic polymers; plasma processing;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2005.845358
Filename
1420419
Link To Document