Title :
Treatment of a perfluorocarbon using nonthermal plasma produced by atmospheric streamer corona discharge
Author :
Hayashi, Nobuya ; Satoh, Saburoh
Author_Institution :
Dept. of Electr. & Electron. Eng., Saga Univ., Japan
fDate :
4/1/2005 12:00:00 AM
Abstract :
A nonthermal plasma produced by streamer corona discharge at atmospheric pressure was investigated for the treatment of perfluorocarbon gas. The effectiveness of fluorocarbon treatment was investigated using mixture gases of Ar or N with CF4. A maximum decomposition rate of 86% and a maximum energy efficiency of 0.6 g/kWh were achieved using the mixture gas of CF4 (1%) and Ar (99%).
Keywords :
argon; carbon compounds; corona; dissociation; gas mixtures; nitrogen; plasma chemistry; plasma diagnostics; plasma materials processing; plasma production; CF4-Ar; CF4-N; atmospheric streamer corona discharge; decomposition; energy efficiency; gas mixtures; nonthermal plasma; perfluorocarbon gas treatment; Argon; Atmospheric-pressure plasmas; Corona; Electrodes; Gases; Plasma applications; Plasma devices; Plasma materials processing; Plasma properties; Wires; Atmospheric plasma; fluorocarbon decomposition; streamer corona discharge;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845003
