Title :
Active Charge/Discharge IGBT Modulator for Marx Generator and Plasma Applications
Author :
Steenkamp, Casper J T ; Bradley, Michael P.
Author_Institution :
Phys. & Eng. Phys. Dept., Saskatchewan Univ., Saskatoon, Sask.
fDate :
4/1/2007 12:00:00 AM
Abstract :
In this paper, we present a Marx-stackable insulated-gate-bipolar-transistors-based modulator for plasma ion implantation and other pulsed high voltage-high peak power applications. Active control of charging and discharging cycles permits rigid pulse forms, arbitrary duty cycles and internal efficiencies exceeding 90%. We demonstrate a 20-kV 15-A generator using a 2-kV Marx generator to drive a pulse transformer
Keywords :
modulators; pulse generators; pulse transformers; pulsed power supplies; 15 A; 2 kV; 20 kV; IGBT modulator; Marx generator; duty cycles; insulated gate bipolar transistors; internal efficiencies; plasma ion implantation; pulse transformer; pulsed high voltage high peak power applications; Capacitors; Insulated gate bipolar transistors; Ion implantation; Optical pulse generation; Plasma applications; Plasma immersion ion implantation; Power generation; Pulse modulation; Pulse transformers; Switches; Capacitor bank; Marx generator; plasma ion implantation (PII); power modulation; pulsed power;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2007.892739
