Title :
Sheath dynamics in radio-frequency atmospheric glow discharges
Author :
Shi, J.J. ; Kong, M.G.
Author_Institution :
Dept. of Electron. & Electr. Eng., Loughborough Univ., UK
fDate :
4/1/2005 12:00:00 AM
Abstract :
This paper presents images of dynamic sheath evolution in a radio-frequency atmospheric pressure glow discharge at 13.56 MHz. Electron mean energy, electron production rate, electron density, and electric field are used to highlight volumetric gas ionization at low-current densities and localized gas ionization at large current densities.
Keywords :
current density; glow discharges; high-frequency discharges; ionisation; plasma density; plasma sheaths; 13.56 MHz; current densities; electron density; electron mean energy; electron production rate; localized gas ionization; radiofrequency atmospheric glow discharges; sheath dynamics; volumetric gas ionization; Current density; Electrodes; Electrons; Glow discharges; Helium; Ionization; Plasma chemistry; Plasma properties; Plasma sheaths; Radio frequency; Atmospheric pressure glow discharges; glow modes; plasma dynamics; sheath; simulation;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.844999
