Title :
Dynamics of E-H mode transition in high-pressure RF inductively coupled plasmas
Author :
Razzak, M. Abdur ; Takamura, Shuichi ; Uesugi, Yoshihiko
Author_Institution :
Dept. of Energy Eng. & Sci., Nagoya Univ., Japan
fDate :
4/1/2005 12:00:00 AM
Abstract :
Capacitive (E) to inductive (H) mode transition dynamics in radio frequency (RF) argon inductively coupled plasmas (ICPs) with up to atmospheric pressure is studied experimentally. High-speed imaging (13500 fps) is performed to investigate the transition dynamics, and to estimate the characteristic time scale of E-H mode transition. The effect of diatomic gas inclusion (here N2) on the E-H mode transition dynamics is also discussed.
Keywords :
argon; high-frequency discharges; high-speed optical techniques; plasma diagnostics; plasma instability; Ar; argon; atmospheric pressure; capacitive-inductive mode transition; characteristic time scale; diatomic gas inclusion; high-pressure RF inductively coupled plasmas; high-speed imaging; Argon; Atmospheric-pressure plasmas; Electrons; Ignition; Ionization; Plasma diagnostics; Plasma properties; Plasma sources; Power engineering and energy; Radio frequency; high-speed imaging; inductively coupled plasma;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845019
