Title :
Formation properties of the main-discharge in pure Ar gas using the automatically preionized plasma electrode
Author :
Hong, Sung Ki ; Hayashi, Nobuya ; Ihara, Satoshi ; Satoh, Saburoh ; Yamabe, Chobei
Author_Institution :
Dept. of Electr. & Electron. Eng., Saga Univ., Japan
fDate :
4/1/2005 12:00:00 AM
Abstract :
In order to develop the discharge-pumped Ar2* excimer laser, images of discharge properties in relatively low-pressure (1∼5 atm) pure Ar gas were obtained using the automatically preionized (API) plasma electrode. The API plasma electrode has a rod-type preionization electrode covered with a ceramic pipe as dielectric and is 74 cm long. The effect of the dielectric capacitance of the ceramic pipe on the API plasma electrode is determined.
Keywords :
argon; capacitance; electrodes; excimer lasers; plasma instability; preionisation; surface discharges; 74 cm; Ar; automatically preionized plasma electrode; ceramic pipe; dielectric capacitance; discharge-pumped Ar2 excimer laser; low-pressure pure Ar gas; main-discharge formation properties; rod-type preionization electrode; Argon; Capacitance; Cathodes; Ceramics; Dielectrics; Electrodes; Laser stability; Plasma properties; Plasma stability; Surface discharges; Electric discharge pumping; electrodes; preionization;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845926
